Development of novel SiC MEMS-Based Microanalytical Systems for low-power, field-deployable monitoring.

Università degli Studi di Trento

Civil, Environmental and Mechanical Engineering
Cycle: 42

The development of innovative microanalytical technologies for real-time, on-line measurements is a critical bottleneck in modern industrial monitoring. This project proposes a monolithic micromachined system based on Silicon Carbide (SiC), strategically leveraging SiC’s superior chemical inertness and mechanical robustness compared to standard Silicon. By utilizing SiC, the system achieves enhanced thermal stability for microhotplate configurations and improved frequency stability in resonant sensors. The architecture integrates (i) an ultra-low form factor microfluidic separation module and (ii) a multi-modal SiC sensor for precise analyte identification. The seamless integration of a microfluidic pretreatment stage with a SiC-based sensing core eliminates sample degradation during transport, enabling sub-minute analytical cycles essential for precision farming and safety monitoring. The final output is a low-power, field-deployable platform tailored for the agri-food sector, capable of detecting early-stage contamination or quality shifts directly in harsh production environments.
Advisors FBK: A. Bagolini, A. Adami

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